Surface chemical analysis - Secondary-ion mass spectrometry - Determination of boron atomic concentration in silicon using uniformly doped materials
国外标准现行
标准号:ISO 14237-2010
标准名称: 表面化学分析.二次离子质谱.用均匀掺杂物质测定硅中硼的原子浓度
英文名称:Surface chemical analysis - Secondary-ion mass spectrometry - Determination of boron atomic concentration in silicon using uniformly doped materials