Testing of materials for semiconductor technology - Determination of the geometric dimensions of semiconductor wafers - Part 1: Thickness and thickness variation
国外标准现行
标准号:DIN 50441-1-1996
标准名称: 半导体工艺材料试验.半导体片几何尺寸测量.第1部分:厚度和厚度变化
英文名称:Testing of materials for semiconductor technology - Determination of the geometric dimensions of semiconductor wafers - Part 1: Thickness and thickness variation