Testing of materials for semiconductor technology - Determination of the geometric dimensions of semiconductor wafers - Part 4: Slice diameter, diamter variation, flat diameter, flat length, flat depth
标准号:DIN 50441-4-1999
标准名称: 半导体工艺用材料的试验.半导体圆片几何尺寸的测定.第4部分:圆片直径,直径变化量,扁片直径,扁片长度和扁片厚度
英文名称:Testing of materials for semiconductor technology - Determination of the geometric dimensions of semiconductor wafers - Part 4: Slice diameter, diamter variation, flat diameter, flat length, flat depth
标准类型:国外标准
标准状态:现行
中国标准分类号(CCS):H82
国际标准分类号(ICS):29.045