Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 3: Aluminium (Al), cobalt (Co), copper (Cu), sodium (Na), nickel (Ni) and zinc (Zn) in nitric acid by ICP-MS
标准号:DIN 50451-3-2003
标准名称: 半导体工艺用材料测试.液体中痕量元素测定.第3部分:用电感耦合等离子体质谱法测定硝酸中铝(AL)、钴(Co)、铜(Cu)、钠(Na)、镍(Ni)和锌(Zn)的含量
英文名称:Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 3: Aluminium (Al), cobalt (Co), copper (Cu), sodium (Na), nickel (Ni) and zinc (Zn) in nitric acid by ICP-MS
标准类型:国外标准
标准状态:现行
中国标准分类号(CCS):H82
国际标准分类号(ICS):29.045
替代以下标准:DIN 50451-3-2014