Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 3: Determination of 31 elements in high-purity nitric acid by ICP-MS
标准号:DIN 50451-3-2014
标准名称: 半导体工艺用材料测试. 液体中痕量元素测定. 第3部分: 使用电感耦合等离子体质谱法 (ICP-MS) 测定高纯度硝酸中的31种元素
英文名称:Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 3: Determination of 31 elements in high-purity nitric acid by ICP-MS
标准类型:国外标准
标准状态:现行
中国标准分类号(CCS):H82
国际标准分类号(ICS):29.045