Microbeam analysis - Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers for use in electron probe microanalysis
国外标准现行
标准号:ISO 15632-2012
标准名称: 微光束分析.带半导体探测器能量发散X射线分光仪的仪器规范
英文名称:Microbeam analysis - Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers for use in electron probe microanalysis