Standard Practice for Measuring Sheet Resistance of Thin Film Conductors For Flat Panel Display Manufacturing Using a Noncontact Eddy Current Gage
国外标准现行
标准号:ASTM F1844-1997(2002)
标准名称: 用非接触式涡流计测量平板显示器制造用薄膜导体耐力的标准操作规程
英文名称:Standard Practice for Measuring Sheet Resistance of Thin Film Conductors For Flat Panel Display Manufacturing Using a Noncontact Eddy Current Gage