Standard Test Method for Measuring the Depth of Crystal Damage of a Mechanically Worked Silicon Slice Surface by Angle Polishing and Defect Etching
国外标准现行
标准号:ASTM F950-1998
标准名称: 用角抛光和疵点侵蚀加工法测量机械加工硅片表面晶体损坏深度的试验方法
英文名称:Standard Test Method for Measuring the Depth of Crystal Damage of a Mechanically Worked Silicon Slice Surface by Angle Polishing and Defect Etching