Surface chemical analysis -- Secondary-ion mass spectrometry -- Determination of relative sensitivity factors from ion-implanted reference materials
国外标准现行
标准号:JISK 0163-2010
标准名称: 表面化学分析.次级离子质谱法.离子注入标样中相对灵敏度系数的测定
英文名称:Surface chemical analysis -- Secondary-ion mass spectrometry -- Determination of relative sensitivity factors from ion-implanted reference materials